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US07651792B2 Hard films, multilayer hard films, and production methods thereof 有权
硬膜，多层硬膜及其制造方法

Hard films, multilayer hard films, and production methods thereof
Abstract:
A hard film contains [(Nb1−d,Tad)aAl1−a](C1−xNx), [(Nb1−d,Tad)a,Al1−a−b−c,Sib,Bc](C1−xNx), [(Cr,V)p(Nb,Ta)q(Al,Si,B)r](C1−xNx), or [(Ti,Cr,V)p(Nb,Ta)q(Al,Si,B)r](C1−xNx), in which the atomic ratios satisfy the following conditions: 0.4≦a≦0.6, 0
Abstract(Chinese):

硬质膜含有[（Nb1-d，Tad）aAl1-a]（C1-xNx），[（Nb1-d，Tad）a，Al1-abc，Sib，Bc]（C1-xNx） （Nb，Ta）q（Al，Si，B）r]（C1-xNx）或[（Ti，Cr，V）p（Nb，Ta）q（Al，Si，B） C1-xNx），其中原子比满足以下条件：0.4 <= a <= 0.6,0

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