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US07646538B2 Methods and apparatus for creating apertures through microlens arrays using curved cradles 失效
用于通过使用弯曲支架的微透镜阵列产生孔的方法和装置

Methods and apparatus for creating apertures through microlens arrays using curved cradles
Abstract:
Methods for creating apertures in a layer on a back side of a substrate that includes a microlens array on a front side thereof include curving the substrate into a cylindrical surface segment that defines an axis, so that the microlens array on the front side of the substrate faces the axis. A pulsed laser beam is scanned from the axis circumferentially along the cylindrical surface segment, to pass through the microlens array on the front side of the substrate and into the layer on the back side of the substrate to create the apertures, while simultaneously translating the substrate and/or the scanned pulsed laser beam axially relative to one another. Related apparatus and microlens array products are also disclosed.
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