Invention Grant
- Patent Title: Small ultra-high NA catadioptric objective
- Patent Title (中): 小超高NA反射折射目标
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Application No.: US11093850Application Date: 2005-03-29
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Publication No.: US07646533B2Publication Date: 2010-01-12
- Inventor: Yung-Ho Chuang , David R. Shafer , J. Joseph Armstrong
- Applicant: Yung-Ho Chuang , David R. Shafer , J. Joseph Armstrong
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Technologies Corporation
- Current Assignee: KLA-Tencor Technologies Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Smyrski Law Group, A P.C.
- Main IPC: G02B17/00
- IPC: G02B17/00

Abstract:
A relatively high spectral bandwidth objective employed for use in imaging a specimen and method for imaging a specimen is provided. The objective includes a lens group having at least one focusing lens configured to receive light energy and form focused light energy. The focused light energy forms an intermediate image. The objective further includes at least one field lens located in proximity to an intermediate image, and a catadioptric arrangement positioned to receive the intermediate light energy from the at and form controlled light energy. The catadioptric arrangement may include at least one Mangin element and can include a meniscus lens element.
Public/Granted literature
- US20060158720A1 Small ultra-high NA catadioptric objective Public/Granted day:2006-07-20
Information query
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B17/00 | 有或无折射元件的具有反射面的系统 |