Invention Grant
US07646533B2 Small ultra-high NA catadioptric objective 有权
小超高NA反射折射目标

Small ultra-high NA catadioptric objective
Abstract:
A relatively high spectral bandwidth objective employed for use in imaging a specimen and method for imaging a specimen is provided. The objective includes a lens group having at least one focusing lens configured to receive light energy and form focused light energy. The focused light energy forms an intermediate image. The objective further includes at least one field lens located in proximity to an intermediate image, and a catadioptric arrangement positioned to receive the intermediate light energy from the at and form controlled light energy. The catadioptric arrangement may include at least one Mangin element and can include a meniscus lens element.
Public/Granted literature
Information query
Patent Agency Ranking
0/0