Invention Grant
- Patent Title: Deformable mirror device with oscillating states
- Patent Title (中): 具有振荡状态的变形镜装置
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Application No.: US12004607Application Date: 2007-12-24
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Publication No.: US07646528B2Publication Date: 2010-01-12
- Inventor: Yoshihiro Maeda , Fusao Ishii , Hirotoshi Ichikawa , Kazuma Arai
- Applicant: Yoshihiro Maeda , Fusao Ishii , Hirotoshi Ichikawa , Kazuma Arai
- Applicant Address: JP JP
- Assignee: Silicon Quest Kabushiki-Kaisha,Olympus Corporation
- Current Assignee: Silicon Quest Kabushiki-Kaisha,Olympus Corporation
- Current Assignee Address: JP JP
- Agent Bo-In Lin
- Main IPC: G02B26/00
- IPC: G02B26/00 ; G02F1/29 ; G02B26/06
Abstract:
A mirror device which deflects incident light includes: a mirror arranged on a substrate and supported by a hinge; an address electrode deflecting the mirror to an ON state, an OFF state, or an oscillating state; a drive circuit applying a voltage to the address electrode; and a first stopper unit determining an oscillation amplitude in the oscillating state.
Public/Granted literature
- US20080174855A1 Deformable mirror device with oscillating states Public/Granted day:2008-07-24
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