Invention Grant
US07646079B2 Semiconductor device, method of manufacturing the same, circuit board, and method of manufacturing the same 有权
半导体装置及其制造方法,电路基板及其制造方法

Semiconductor device, method of manufacturing the same, circuit board, and method of manufacturing the same
Abstract:
In the semiconductor device of the present invention, an active region is formed in an upper surface of a semiconductor substrate, and is surrounded by a trench filled with an oxide. A through-hole electrode electrically connected to the active region extends from the upper surface of the semiconductor substrate to a lower surface thereof. A bottom end of the through-hole electrode juts out of an insulating film covering the lower surface of the semiconductor substrate. Accordingly, a jutting portion of the through-hole electrode is embedded in the bonding material when the semiconductor device is mounted on a mounting board, and thus the connection reliability therebetween is improved.
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