Invention Grant
- Patent Title: Method of fabricating CMOS image sensor
- Patent Title (中): CMOS图像传感器的制作方法
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Application No.: US12151859Application Date: 2008-05-09
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Publication No.: US07646076B2Publication Date: 2010-01-12
- Inventor: Yong Suk Lee
- Applicant: Yong Suk Lee
- Applicant Address: KR Seoul
- Assignee: Dongbu Electronics Co., Ltd.
- Current Assignee: Dongbu Electronics Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: The Law Offices of Andrew D. Fortney
- Agent Andrew D. Fortney
- Priority: KR10-2004-0105563 20041214
- Main IPC: H01L31/00
- IPC: H01L31/00

Abstract:
A method of fabricating a CMOS image sensor is provided, in which a trapezoidal microlens pattern profile is formed to facilitate reflowing the microlens pattern and by which a curvature of the microlens may be enhanced to raise its light-condensing efficiency. The method includes forming a plurality of photodiodes on a semiconductor substrate; forming an insulating interlayer on the semiconductor substrate including the photodiodes; forming a protective layer on the insulating interlayer; forming a plurality of color filters corresponding to the photodiodes; forming a top coating layer on the color filters; forming a microlens pattern on the top coating layer; and forming a plurality of microlenses by reflowing the microlens pattern.
Public/Granted literature
- US20080277751A1 Method of fabricating CMOS image sensor Public/Granted day:2008-11-13
Information query
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