A power semiconductor device with charge compensation structure and a method for producing the same is disclosed. In one embodiment, the power semiconductor device has in a semiconductor body a drift path between a body zone and a substrate region. The drift path is divided into drift zones of a first conduction type. A field stop zone is provided having the first conduction type, which is arranged on the substrate region, wherein the net dopant concentration of the field stop zone is lower than that of the substrate region and higher than that of the drift zones.