Invention Grant
- Patent Title: Microscale gas discharge ion detector
- Patent Title (中): 微型气体放电离子检测器
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Application No.: US11553948Application Date: 2006-10-27
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Publication No.: US07645996B2Publication Date: 2010-01-12
- Inventor: Wei Yang , Ulrich Bonne
- Applicant: Wei Yang , Ulrich Bonne
- Applicant Address: US NJ Morristown
- Assignee: Honeywell International Inc.
- Current Assignee: Honeywell International Inc.
- Current Assignee Address: US NJ Morristown
- Agent Kris T. Fredrick
- Main IPC: G01T1/29
- IPC: G01T1/29 ; H01L21/30

Abstract:
A microscale planar device for detecting particles under high pressure with high sensitivity. The device may have an anode and cathode with an insulator situated between them. The insulator may have a number of holes, cavities or channels between the anode and cathode. There may be conductive rings at the perimeters of openings of the channels on the anode side of the insulator. These rings may be a part of the anode. An ion may be attracted into one of the channels where it interacts with a gas to result in an avalanche breakdown. The breakdown may be detected by instrumentation connected to the anode and cathode. The lateral and/or longitudinal dimensions of the channels may be such that the device may operate as a detector with ambient air as a gas under its pressure of about one atmosphere.
Public/Granted literature
- US20080142715A1 MICROSCALE GAS DISCHARGE ION DETECTOR Public/Granted day:2008-06-19
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