Invention Grant
US07645690B2 Method for producing an integrated circuit having semiconductor zones with a steep doping profile 有权
具有陡峭掺杂分布的半导体区的集成电路的制造方法

Method for producing an integrated circuit having semiconductor zones with a steep doping profile
Abstract:
An integrated circuit and method, producing semiconductor zones with a steep doping profile is disclosed. In one embodiment, dopants are implanted in a region corresponding to the semiconductor zone to be formed and which has at least one topology process. During the subsequent laser irradiation for activating the dopants in the semiconductor zone, regions which are laterally directly adjacent to the semiconductor zone are protected against melting on account of the topology process.
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