Invention Grant
US07645684B2 Wafer and method of producing a substrate by transfer of a layer that includes foreign species
有权
晶片和通过转移包括外来物质的层来生产基板的方法
- Patent Title: Wafer and method of producing a substrate by transfer of a layer that includes foreign species
- Patent Title (中): 晶片和通过转移包括外来物质的层来生产基板的方法
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Application No.: US12139609Application Date: 2008-06-16
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Publication No.: US07645684B2Publication Date: 2010-01-12
- Inventor: Fabrice Letertre , Yves Mathieu Le Vaillant , Eric Jalaguier
- Applicant: Fabrice Letertre , Yves Mathieu Le Vaillant , Eric Jalaguier
- Applicant Address: FR Bernin FR Paris
- Assignee: S.O.I.Tec Silicon on Insulator Technologies,Commissariat a l'Energie Atomique
- Current Assignee: S.O.I.Tec Silicon on Insulator Technologies,Commissariat a l'Energie Atomique
- Current Assignee Address: FR Bernin FR Paris
- Agency: Winston & Strawn LLP
- Priority: FR0212405 20021007
- Main IPC: H01L21/30
- IPC: H01L21/30

Abstract:
A method of producing a substrate that has a transfer crystalline layer transferred from a donor wafer onto a support. The transfer layer can include one or more foreign species to modify its properties. In the preferred embodiment an atomic species is implanted into a zone of the donor wafer that is substantially free of foreign species to form an embrittlement or weakened zone below a bonding face thereof, with the weakened zone and the bonding face delimiting a transfer layer to be transferred. The donor wafer is preferably then bonded at the level of its bonding face to a support. Stresses are then preferably applied to produce a cleavage in the region of the weakened zone to obtain a substrate that includes the support and the transfer layer. Foreign species are preferably diffused into the thickness of the transfer layer prior to implantation or after cleavage to modify the properties of the transfer layer, preferably its electrical or optical properties. The preferred embodiment produces substrates with a thin InP layer rendered semi-insulating by iron diffusion.
Public/Granted literature
- US20080248631A1 WAFER AND METHOD OF PRODUCING A SUBSTRATE BY TRANSFER OF A LAYER THAT INCLUDES FOREIGN SPECIES Public/Granted day:2008-10-09
Information query
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