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US07645629B2 Fabricating CMOS image sensor 有权
制造CMOS图像传感器

Fabricating CMOS image sensor
Abstract:
A CMOS image sensor and a fabricating method thereof are provided. The method includes forming a nitride layer over a boundary region between a device isolation region and a pixel region, forming a silicide barrier layer in the pixel region and performing a silicide process. A boundary portion of the silicide barrier layer formed in the pixel region can be prevented from being wet-etched while the silicide barrier layer is removed by the wet etching process.
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