Invention Grant
- Patent Title: Fabricating CMOS image sensor
- Patent Title (中): 制造CMOS图像传感器
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Application No.: US11841072Application Date: 2007-08-20
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Publication No.: US07645629B2Publication Date: 2010-01-12
- Inventor: Jin-Han Kim
- Applicant: Jin-Han Kim
- Applicant Address: KR Seoul
- Assignee: Dongbu HiTek Co., Ltd.
- Current Assignee: Dongbu HiTek Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Sherr & Vaughn, PLLC
- Priority: KR10-2006-0079634 20060823
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A CMOS image sensor and a fabricating method thereof are provided. The method includes forming a nitride layer over a boundary region between a device isolation region and a pixel region, forming a silicide barrier layer in the pixel region and performing a silicide process. A boundary portion of the silicide barrier layer formed in the pixel region can be prevented from being wet-etched while the silicide barrier layer is removed by the wet etching process.
Public/Granted literature
- US20080048220A1 FABRICATING CMOS IMAGE SENSOR Public/Granted day:2008-02-28
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