A method for fabricating semiconductor components with lens structures and lens support structures includes the steps of providing semiconductor substrates on a substrate, attaching a carrier to the substrate configured to support the substrate during various processes, thinning the carrier to form lens support structures having desired geometrical characteristics, singulating the substrate and the carrier such that each semiconductor substrate includes a lens support structure, and then attaching the lens structures to the support structures. Each semiconductor component includes a thinned semiconductor substrate, a support structure attached to the semiconductor substrate, and a lens structure attached to the support structure. A system for fabricating the semiconductor components includes the substrate containing the semiconductor substrates, and the carrier configured to support the wafer, to protect the semiconductor substrates and to provide the lens support structures.