Invention Grant
US07645492B2 Plasma coating system for accommodating substrates of different shapes 有权
用于容纳不同形状的基板的等离子体涂覆系统

Plasma coating system for accommodating substrates of different shapes
Abstract:
A plasma coating system includes at least one coating station with a first side and a second side defining a pathway with at least one bend. The coating station also includes a first plasma arc that provides a plasma jet directed towards a substrate. The first plasma arc is positioned on either the first side or the second side of the bend.
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