Invention Grant
US07644613B2 Flow detector device with self check 有权
流量检测装置自检

Flow detector device with self check
Abstract:
A thermal flow sensor is equipped with a self-test unit that monitors the device and generates a fault signal in the presence of a malfunction. The self-test unit can e.g. monitor the integrity of a membrane carrying the heater and temperature sensors, or it can monitor various operational parameters of the device, thereby increasing the safety of the device.
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