Invention Grant
US07644447B2 Scanning probe microscope capable of measuring samples having overhang structure 有权
扫描探针显微镜能够测量具有突出结构的样品

Scanning probe microscope capable of measuring samples having overhang structure
Abstract:
Provided is a scanning probe microscope capable of precisely analyzing characteristics of samples having an overhang surface structure. The scanning probe microscope comprises a first probe, a first scanner changing a position of the first probe along a straight line, and a second scanner changing a position of a sample in a plane, wherein the straight line in which the position of the first probe is changed by using the first scanner is non-perpendicular to the plane in which the position of the sample is changed by using the second scanner.
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