Invention Grant
- Patent Title: Highly responsive master-slave valve positioning
- Patent Title (中): 高灵敏度的主从阀定位
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Application No.: US11278071Application Date: 2006-03-30
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Publication No.: US07643909B2Publication Date: 2010-01-05
- Inventor: David J. Goldman , Martin Ryan , Vladislav Davidkovich , Gordon Hill
- Applicant: David J. Goldman , Martin Ryan , Vladislav Davidkovich , Gordon Hill
- Applicant Address: US MA Wilmington
- Assignee: MKS Instruments, Inc.
- Current Assignee: MKS Instruments, Inc.
- Current Assignee Address: US MA Wilmington
- Agency: McDermott Will & Emery, LLP
- Main IPC: G06F19/00
- IPC: G06F19/00

Abstract:
A master valve and at least one slave valve are connected via a network, wherein upon broadcast of a position setpoint of the master valve the at least one slave valve achieves a corresponding position within a shortened period of time, such network being a dedicated network or high speed shared network with position setpoint priority.
Public/Granted literature
- US20070235668A1 HIGHLY RESPONSIVE MASTER-SLAVE VALVE POSITIONING Public/Granted day:2007-10-11
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