Invention Grant
- Patent Title: Laser system
- Patent Title (中): 激光系统
-
Application No.: US11982103Application Date: 2007-10-31
-
Publication No.: US07643529B2Publication Date: 2010-01-05
- Inventor: Daniel J. W. Brown , William N. Partlo , Richard L. Sandstrom
- Applicant: Daniel J. W. Brown , William N. Partlo , Richard L. Sandstrom
- Applicant Address: US CA San Diego
- Assignee: Cymer, Inc.
- Current Assignee: Cymer, Inc.
- Current Assignee Address: US CA San Diego
- Agency: DiBerardino Law LLC
- Main IPC: H01S3/22
- IPC: H01S3/22

Abstract:
An apparatus/method may comprise a line narrowed pulsed lithography laser light source which may comprise: a seed pulse providing laser system which may comprise: a first pulsed seed laser producing seed pulses at a rate of X kHz; a second pulsed seed laser producing seed pulses at a rate of X kHz; an amplification system which may comprise: a first amplifier gain system which may comprise a first and a second pulsed gas discharge amplifier gain medium, each with a nominal center wavelength in the UV range, and each operating at ½ X kHz on output pulses from the first seed laser; a second amplifier gain system which may comprise a first and a second pulsed amplifier gain medium, each with a nominal center wavelength in the UV range, and each operating at ½ X kHz on output pulses from the second seed laser.
Public/Granted literature
- US20080225904A1 Laser system Public/Granted day:2008-09-18
Information query