Invention Grant
- Patent Title: Interferometric optical display system with broadband characteristics
- Patent Title (中): 干涉光学显示系统具有宽带特性
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Application No.: US11401023Application Date: 2006-04-10
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Publication No.: US07643203B2Publication Date: 2010-01-05
- Inventor: Evgeni Gousev , Gang Xu , Marek Mienko
- Applicant: Evgeni Gousev , Gang Xu , Marek Mienko
- Applicant Address: US CA San Diego
- Assignee: QUALCOMM MEMS Technologies, Inc.
- Current Assignee: QUALCOMM MEMS Technologies, Inc.
- Current Assignee Address: US CA San Diego
- Agency: Knobbe Martens Olson & Bear LLP
- Main IPC: G02B26/00
- IPC: G02B26/00 ; G02B26/08 ; G02F1/29

Abstract:
Broad band white color can be achieved in MEMS display devices by incorporating a material having an extinction coefficient (k) below a threshold value for wavelength of light within an operative optical range of the interferometric modulator. One embodiment provides a method of making the MEMS display device comprising depositing said material over at least a portion of a transparent substrate, depositing a dielectric layer over the layer of material, forming a sacrificial layer over the dielectric, depositing an electrically conductive layer on the sacrificial layer, and forming a cavity by removing at least a portion of the sacrificial layer. The suitable material may comprise germanium, germanium alloy of various compositions, doped germanium or doped germanium-containing alloys, and may be deposited over the transparent substrate, incorporated within the transparent substrate or the dielectric layer.
Public/Granted literature
- US20070236774A1 Interferometric optical display system with broadband characteristics Public/Granted day:2007-10-11
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