Invention Grant
US07643195B2 Mirror device 失效
镜像设备

Mirror device
Abstract:
A mirror device comprises: an electrode placed on a substrate; a hinge which is connected to the electrode and which has a flat part at an end part on a side opposite to the electrode; and a mirror placed on the flat part, wherein a protrusion part formed on the flat part is placed between the flat part and the mirror.
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