Invention Grant
US07643188B2 Method of recording an exposure pattern in a recording layer of a holographic mask, method of forming an exposure pattern in a photosensitive material film, method of manufacturing a semiconductor device and method of manufacturing an electro-optic device 失效
在全息掩模的记录层中记录曝光图案的方法,在感光材料膜中形成曝光图案的方法,制造半导体器件的方法和制造电光器件的方法

  • Patent Title: Method of recording an exposure pattern in a recording layer of a holographic mask, method of forming an exposure pattern in a photosensitive material film, method of manufacturing a semiconductor device and method of manufacturing an electro-optic device
  • Patent Title (中): 在全息掩模的记录层中记录曝光图案的方法,在感光材料膜中形成曝光图案的方法,制造半导体器件的方法和制造电光器件的方法
  • Application No.: US11691836
    Application Date: 2007-03-27
  • Publication No.: US07643188B2
    Publication Date: 2010-01-05
  • Inventor: Chiharu Iriguchi
  • Applicant: Chiharu Iriguchi
  • Applicant Address: JP Tokyo
  • Assignee: Seiko Epson Corporation
  • Current Assignee: Seiko Epson Corporation
  • Current Assignee Address: JP Tokyo
  • Agency: Oliff & Berridge, PLC
  • Priority: JP2006-101656 20060403
  • Main IPC: G03H1/20
  • IPC: G03H1/20 G03H1/04
Method of recording an exposure pattern in a recording layer of a holographic mask, method of forming an exposure pattern in a photosensitive material film, method of manufacturing a semiconductor device and method of manufacturing an electro-optic device
Abstract:
A method of recording an exposure pattern in a recording layer of a holographic mask, using an original reticle that has the exposure pattern formed therein, the recording method comprising: illuminating a first recording light and a first reference light to the recording layer simultaneously, the first recording light being illuminated through an original reticle placed opposite to the holographic mask with a first gap therebetween, the first reference light being illuminated to the recording layer at a first incident angle; and illuminating a second recording light and a second reference light to the recording layer simultaneously, the second recording light being illuminated through the original reticle placed opposite to the holographic mask with a second gap therebetween, the second gap being different from the first gap, the second reference light being illuminated to the recording layer at a second incident angle.
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