Invention Grant
US07643188B2 Method of recording an exposure pattern in a recording layer of a holographic mask, method of forming an exposure pattern in a photosensitive material film, method of manufacturing a semiconductor device and method of manufacturing an electro-optic device
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在全息掩模的记录层中记录曝光图案的方法,在感光材料膜中形成曝光图案的方法,制造半导体器件的方法和制造电光器件的方法
- Patent Title: Method of recording an exposure pattern in a recording layer of a holographic mask, method of forming an exposure pattern in a photosensitive material film, method of manufacturing a semiconductor device and method of manufacturing an electro-optic device
- Patent Title (中): 在全息掩模的记录层中记录曝光图案的方法,在感光材料膜中形成曝光图案的方法,制造半导体器件的方法和制造电光器件的方法
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Application No.: US11691836Application Date: 2007-03-27
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Publication No.: US07643188B2Publication Date: 2010-01-05
- Inventor: Chiharu Iriguchi
- Applicant: Chiharu Iriguchi
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oliff & Berridge, PLC
- Priority: JP2006-101656 20060403
- Main IPC: G03H1/20
- IPC: G03H1/20 ; G03H1/04

Abstract:
A method of recording an exposure pattern in a recording layer of a holographic mask, using an original reticle that has the exposure pattern formed therein, the recording method comprising: illuminating a first recording light and a first reference light to the recording layer simultaneously, the first recording light being illuminated through an original reticle placed opposite to the holographic mask with a first gap therebetween, the first reference light being illuminated to the recording layer at a first incident angle; and illuminating a second recording light and a second reference light to the recording layer simultaneously, the second recording light being illuminated through the original reticle placed opposite to the holographic mask with a second gap therebetween, the second gap being different from the first gap, the second reference light being illuminated to the recording layer at a second incident angle.
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