Invention Grant
- Patent Title: Exposure apparatus and device manufacturing method
- Patent Title (中): 曝光装置和装置制造方法
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Application No.: US12137614Application Date: 2008-06-12
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Publication No.: US07643125B2Publication Date: 2010-01-05
- Inventor: Atsushi Shigenobu
- Applicant: Atsushi Shigenobu
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A. Inc., I.P. Division
- Priority: JP2007-163018 20070620
- Main IPC: G03B27/68
- IPC: G03B27/68 ; G03B27/52

Abstract:
An exposure apparatus includes a first driving mechanism which drives a first optical element, a second driving mechanism which drives a second optical element, and a control unit which controls the first driving mechanism and the second driving mechanism so as to adjust the astigmatism of a projection optical system. The amount of change in the first order component of the astigmatism and the amount of change in the second order component of the astigmatism upon driving the first optical element by the first driving mechanism have a first ratio, and the amount of change in the first order component of the astigmatism and the amount of change in the second order component of the astigmatism upon driving the second optical element by the second driving mechanism have a second ratio which is different from the first ratio.
Public/Granted literature
- US20080316443A1 EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD Public/Granted day:2008-12-25
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