Invention Grant
US07642631B2 Packaged semiconductor chip comprising an integrated circuit chip ablated with laser and cut with saw blade from wafer
有权
封装的半导体芯片包括用激光烧蚀的集成电路芯片,并从晶片切割锯片
- Patent Title: Packaged semiconductor chip comprising an integrated circuit chip ablated with laser and cut with saw blade from wafer
- Patent Title (中): 封装的半导体芯片包括用激光烧蚀的集成电路芯片,并从晶片切割锯片
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Application No.: US11777878Application Date: 2007-07-13
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Publication No.: US07642631B2Publication Date: 2010-01-05
- Inventor: Szu Wei Lu , Hsin-Hui Lee , Ming-Chung Sung , Mirng-Ji Lii
- Applicant: Szu Wei Lu , Hsin-Hui Lee , Ming-Chung Sung , Mirng-Ji Lii
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater & Matsil, L.L.P.
- Main IPC: H01L23/02
- IPC: H01L23/02

Abstract:
A packaged semiconductor chip comprising an integrated circuit chip including a low-k dielectric layer and a chip substrate, wherein an edge of the integrated circuit chip has a first edge portion and a second edge portion. At least part of the first edge portion being across a same level as the low-k dielectric layer, and the first edge portion having been laser ablated to have a series of rounded recesses formed therein. The second edge portion being across a same level as at least part of the chip substrate, and the second edge portion having a different surface texture than that of the first edge portion. The packaged semiconductor chip also comprises a packaging substrate having the integrated circuit chip attached and a plurality of solder bumps electrically connecting between the packaging substrate and the integrated circuit chip.
Public/Granted literature
Information query
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