Invention Grant
US07642631B2 Packaged semiconductor chip comprising an integrated circuit chip ablated with laser and cut with saw blade from wafer 有权
封装的半导体芯片包括用激光烧蚀的集成电路芯片,并从晶片切割锯片

Packaged semiconductor chip comprising an integrated circuit chip ablated with laser and cut with saw blade from wafer
Abstract:
A packaged semiconductor chip comprising an integrated circuit chip including a low-k dielectric layer and a chip substrate, wherein an edge of the integrated circuit chip has a first edge portion and a second edge portion. At least part of the first edge portion being across a same level as the low-k dielectric layer, and the first edge portion having been laser ablated to have a series of rounded recesses formed therein. The second edge portion being across a same level as at least part of the chip substrate, and the second edge portion having a different surface texture than that of the first edge portion. The packaged semiconductor chip also comprises a packaging substrate having the integrated circuit chip attached and a plurality of solder bumps electrically connecting between the packaging substrate and the integrated circuit chip.
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