Invention Grant
- Patent Title: Fabrication method for polycrystalline silicon thin film and apparatus using the same
- Patent Title (中): 多晶硅薄膜的制造方法及使用其的装置
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Application No.: US11949483Application Date: 2007-12-03
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Publication No.: US07642623B2Publication Date: 2010-01-05
- Inventor: Ji-Yong Park , Hye-Hyang Park
- Applicant: Ji-Yong Park , Hye-Hyang Park
- Applicant Address: KR Yongin
- Assignee: Samsung Mobile Display Co., Ltd.
- Current Assignee: Samsung Mobile Display Co., Ltd.
- Current Assignee Address: KR Yongin
- Agency: H.C. Park & Associates, PLC
- Priority: KR10-2003-0073196 20031020
- Main IPC: H01L29/02
- IPC: H01L29/02

Abstract:
The present invention relates to a fabrication method for polycrystalline silicon thin film in which amorphous silicon is crystallized by laser using a mask having a mixed structure of laser transmission pattern group and laser non-transmission pattern group, wherein the mask comprises two or more of dot pattern groups in which the non-transmission pattern group is perpendicular to a scan directional axis, and the dot pattern groups are formed in a certain shape and comprise first non-transmission patterns that are not respectively arranged in a row in an axis direction perpendicular to the scan directional axis, and second non-transmission patterns that are formed in the same arrangement as the first non-transmission patterns, but are positioned in such a manner that the second non-transmission patterns are parallel to the first non-transmission patterns and vertical axis of the scan directional axis.
Public/Granted literature
- US20080073650A1 FABRICATION METHOD FOR POLYCRYSTALLINE SILICON THIN FILM AND APPARATUS USING THE SAME Public/Granted day:2008-03-27
Information query
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