Invention Grant
- Patent Title: Phase changeable memory cells and methods of forming the same
- Patent Title (中): 相变存储单元及其形成方法
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Application No.: US11288672Application Date: 2005-11-29
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Publication No.: US07642622B2Publication Date: 2010-01-05
- Inventor: Ji-Hye Yi , Byeong-Ok Cho , Sung-Lae Cho
- Applicant: Ji-Hye Yi , Byeong-Ok Cho , Sung-Lae Cho
- Applicant Address: KR Suwon-Si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-Si
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2004-0101999 20041206
- Main IPC: H01L29/22
- IPC: H01L29/22

Abstract:
A phase changeable memory cell is provided. The phase changeable memory cell includes a lower interlayer dielectric layer formed on a semiconductor substrate and a lower conductive plug passing through the lower interlayer dielectric layer. The lower conductive plug is in contact with a phase change material pattern disposed on the lower interlayer dielectric layer. The phase change material pattern and the lower interlayer dielectric layer are covered with an upper interlayer dielectric layer. The phase change material pattern is in direct contact with a conductive layer pattern, which is disposed in a plate line contact hole passing through the upper interlayer dielectric layer. Methods of fabricating the phase changeable memory cell is also provided.
Public/Granted literature
- US20060118913A1 Phase changeable memory cells and methods of forming the same Public/Granted day:2006-06-08
Information query
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