Invention Grant
US07642606B2 Semiconductor device having non-volatile memory and method of fabricating the same
有权
具有非易失性存储器的半导体器件及其制造方法
- Patent Title: Semiconductor device having non-volatile memory and method of fabricating the same
- Patent Title (中): 具有非易失性存储器的半导体器件及其制造方法
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Application No.: US11633948Application Date: 2006-12-05
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Publication No.: US07642606B2Publication Date: 2010-01-05
- Inventor: Sung-Chul Park
- Applicant: Sung-Chul Park
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Mills & Onello, LLP
- Priority: KR10-2006-0032448 20060410
- Main IPC: H01L29/76
- IPC: H01L29/76

Abstract:
A memory cell of a non-volatile memory device, comprises: a select transistor gate of a select transistor on a substrate, the select transistor gate comprising: a gate dielectric pattern; and a select gate on the gate dielectric pattern; first and second memory cell transistor gates of first and second memory cell transistors on the substrate at opposite sides of the select transistor, each of the first and second memory cell transistor gates comprising: a tunnel insulating layer pattern; a charge storage layer pattern on the tunnel insulating layer pattern; a blocking insulating layer pattern on the charge storage layer pattern; and a control gate on the blocking insulating layer pattern; first and second floating junction regions in the substrate between the select transistor gate and the first and second memory cell transistor gates respectively; and first and second drain regions in the substrate at sides of the first and second memory cell transistor gates respectively opposite the first and second floating junction regions respectively. Methods of formation thereof are also provided.
Public/Granted literature
- US20070247887A1 Semiconductor device having non-volatile memory and method of fabricating the same Public/Granted day:2007-10-25
Information query
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