Invention Grant
- Patent Title: Integrated electronic microphone having a perforated rigid back plate membrane
- Patent Title (中): 具有穿孔刚性背板膜的集成电子麦克风
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Application No.: US11647382Application Date: 2006-12-29
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Publication No.: US07642575B2Publication Date: 2010-01-05
- Inventor: Man Wong , Yitshak Zohar
- Applicant: Man Wong , Yitshak Zohar
- Applicant Address: HK Kowloon
- Assignee: The Hong Kong University of Science and Technology
- Current Assignee: The Hong Kong University of Science and Technology
- Current Assignee Address: HK Kowloon
- Agency: Buchanan Ingersoll & Rooney PC
- Main IPC: H01L27/20
- IPC: H01L27/20 ; H01L29/84
Abstract:
The present invention provides an integrated electronic microphone formed as part of a semiconductor device, and a manufacturing method therefor. The microphone is formed with a sensing electrode as part of a sensing membrane, and the sensing electrode is connected to the gate of a sensing transistor to provide an output. The microphone may be operated in constant bias or constant charge mode.
Public/Granted literature
- US20070108541A1 Integrated electronic microphone and a method of manufacturing Public/Granted day:2007-05-17
Information query
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