Invention Grant
US07642544B2 Production method for semiconductor component with stress-carrying semiconductor layer
有权
具有应力承载半导体层的半导体元件的制造方法
- Patent Title: Production method for semiconductor component with stress-carrying semiconductor layer
- Patent Title (中): 具有应力承载半导体层的半导体元件的制造方法
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Application No.: US10521498Application Date: 2003-07-11
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Publication No.: US07642544B2Publication Date: 2010-01-05
- Inventor: Georg Tempel
- Applicant: Georg Tempel
- Applicant Address: DE Munich
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Munich
- Agency: Brinks Hofer Gilson & Lione
- Priority: DE10231964 20020715
- International Application: PCT/DE03/02352 WO 20030711
- International Announcement: WO2004/010485 WO 20040129
- Main IPC: H01L21/20
- IPC: H01L21/20

Abstract:
The invention relates to a semiconductor component with stress-absorbing semiconductor layer (SA) and an associated fabrication method, a crystalline stress generator layer (SG) for generating a mechanical stress being formed on a carrier material (1). An insulating stress transmission layer (2), which transmits the mechanical stress which has been generated to a stress-absorbing semiconductor layer (SA), is formed at the surface of the stress generator layer (SG), with the result that in addition to improved charge carrier mobility, improved electrical properties of the semiconductor component are also obtained.
Public/Granted literature
- US20060118867A1 Semiconductor component with stress-carrying semiconductor layer and corresponding production method Public/Granted day:2006-06-08
Information query
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