Invention Grant
- Patent Title: Silica and silica-like films and method of production
- Patent Title (中): 二氧化硅和二氧化硅样薄膜及其生产方法
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Application No.: US11444283Application Date: 2006-05-31
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Publication No.: US07642199B2Publication Date: 2010-01-05
- Inventor: Paul Meredith , Michael Harvey
- Applicant: Paul Meredith , Michael Harvey
- Applicant Address: US CA Redwood City
- Assignee: Xerocoat Inc.
- Current Assignee: Xerocoat Inc.
- Current Assignee Address: US CA Redwood City
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: AU2005902785 20050531
- Main IPC: H01L21/469
- IPC: H01L21/469 ; C04B14/04
Abstract:
A method of producing a silica or silica-like coating by forming a precursor formulation from oligomeric organosilicate. The precursor formulation is coated on a substrate as a continuous liquid phase. The precursor formulation is then cured in an ammoniacal atmosphere to produce a continuous, interconnected, nano-porous silica network.
Public/Granted literature
- US20060286813A1 Silica and silica-like films and method of production Public/Granted day:2006-12-21
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