Invention Grant
US07642188B2 Mixed signal integrated circuit with improved isolation 失效
混合信号集成电路具有改进的隔离

Mixed signal integrated circuit with improved isolation
Abstract:
A method for reducing an effective lateral resistance of a buried layer in an IC includes forming first and second circuit sections in a common substrate, the second circuit section being spaced laterally from the first circuit section. The method further includes forming an isolation buried layer in the substrate under at least a portion of the first circuit section and forming a conductive layer on a surface of the substrate, the conductive layer overlaying at least a portion of the first circuit section. A plurality of conductive plugs are formed in the substrate for operatively connecting the isolation buried layer to the conductive layer, whereby an effective lateral resistance of the isolation buried layer is reduced.
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