Invention Grant
- Patent Title: Phase change memory cell with roundless micro-trenches
- Patent Title (中): 具有圆形微沟槽的相变存储单元
-
Application No.: US11864719Application Date: 2007-09-28
-
Publication No.: US07642170B2Publication Date: 2010-01-05
- Inventor: Tzyh-Cheang Lee , Chun-Sheng Liang , Fu-Liang Yang
- Applicant: Tzyh-Cheang Lee , Chun-Sheng Liang , Fu-Liang Yang
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: K&L Gates LLP
- Main IPC: H01L21/20
- IPC: H01L21/20

Abstract:
A method for constructing a phase change memory device includes forming a first dielectric layer on a substrate; forming a first conductive component in the first dielectric layer; forming a second dielectric layer over the first conductive component in the first dielectric layer; forming a conductive crown in the second dielectric layer, the conductive crown being in contact and alignment with the conductive component; depositing a third dielectric layer in the conductive crown; and forming a trench filled with chalcogenic materials having an amorphous phase and a crystalline phase programmable by controlling a temperature thereof to represent logic states, wherein the trench extends across the conductive crown, such that the trench is free from a rounded end portion caused by lithography during fabrication of the phase change memory device.
Public/Granted literature
- US20090087945A1 Phase change memory cell with roundless micro-trenches Public/Granted day:2009-04-02
Information query
IPC分类: