Invention Grant
- Patent Title: Three-dimensional flash memory cell
- Patent Title (中): 三维闪存单元
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Application No.: US11781001Application Date: 2007-07-20
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Publication No.: US07642156B2Publication Date: 2010-01-05
- Inventor: Seong-Gyun Kim
- Applicant: Seong-Gyun Kim
- Applicant Address: KR Seoul
- Assignee: Dongbu HiTek Co., Ltd.
- Current Assignee: Dongbu HiTek Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Sherr & Vaughn, PLLC
- Priority: KR10-2006-0068974 20060724
- Main IPC: H01L21/20
- IPC: H01L21/20

Abstract:
Embodiments relate to a three-dimensional flash memory cell and method of forming the same that may be improve the uniformity of flash memory cell by removing a width difference of a polysilicon pattern when forming a floating gate of flash memory device, to thereby improve the reliability of semiconductor device. The process may be simplified due to the self-alignment in the step of forming the polysilicon pattern, which may improve the yield.
Public/Granted literature
- US20080017918A1 THREE-DIMENSIONAL FLASH MEMORY CELL Public/Granted day:2008-01-24
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