Invention Grant
- Patent Title: Manufacturing method for display device
- Patent Title (中): 显示装置的制造方法
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Application No.: US12155204Application Date: 2008-05-30
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Publication No.: US07642141B2Publication Date: 2010-01-05
- Inventor: Yoshiaki Toyota , Takeshi Sato
- Applicant: Yoshiaki Toyota , Takeshi Sato
- Applicant Address: JP Chiba
- Assignee: Hitachi Displays, Ltd.
- Current Assignee: Hitachi Displays, Ltd.
- Current Assignee Address: JP Chiba
- Agency: Stites & Harbison, PLLC
- Agent Juan Carlos A. Marquez, Esq.
- Priority: JP2007-144957 20070531
- Main IPC: H01L21/786
- IPC: H01L21/786

Abstract:
A manufacturing method for a display device having a first conductive type thin film transistor and a second conductive type thin film transistor, comprising the steps of: in formation regions for a first conductive type thin film transistor and a second conductive type thin film transistor forming a semiconductor layer, a first insulating film covering the semiconductor layer and a gate electrode disposed on the first insulating film so as to intersect the semiconductor layer, on substrate having first conductive type impurity regions on both outer sides of a channel region of the semiconductor layer below the gate electrode forming a second insulating film, in the second insulating film and the first insulating film forming a contact hole for a drain electrode and a source electrode, in the formation region for the second conductive type thin film transistor forming electrodes and a second conductive type impurity region.
Public/Granted literature
- US20080299693A1 Manufacturing method for display device Public/Granted day:2008-12-04
Information query
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