Invention Grant
- Patent Title: CMOS image sensor and manufacturing method thereof
- Patent Title (中): CMOS图像传感器及其制造方法
-
Application No.: US11501597Application Date: 2006-08-09
-
Publication No.: US07642120B2Publication Date: 2010-01-05
- Inventor: Yeong Sil Kim
- Applicant: Yeong Sil Kim
- Applicant Address: KR Seoul
- Assignee: Dongbu Electronics Co., Ltd.
- Current Assignee: Dongbu Electronics Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Saliwanchik, Lloyd & Saliwanchik
- Priority: KR10-2005-0073265 20050810
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
Provided is a CMOS (complementary metal oxide semiconductor) image sensor and a manufacturing method thereof. In the method, a photodiode, an interlayer insulating layer, a color filter layer, and a planarizing layer are sequentially formed on a substrate. A photoresist is applied on the planarizing layer. The photoresist is selectively patterned to form a plurality of photoresist patterns. A surface of each photoresist is hardened. The hardened photoresist patterns are reflowed to form microlenses.
Public/Granted literature
- US20070037338A1 CMOS image sensor and manufacturing method thereof Public/Granted day:2007-02-15
Information query
IPC分类: