Invention Grant
US07641776B2 System and method for increasing yield from semiconductor wafer electroplating 有权
用于提高半导体晶圆电镀产量的系统和方法

System and method for increasing yield from semiconductor wafer electroplating
Abstract:
A system and method increase yield from semiconductor wafer electroplating. The aspects include a semiconductor wafer, the semiconductor wafer comprising a plurality of die areas. A plating ring for holding the semiconductor wafer in position during electroplating is also included, the plating ring substantially surrounding a circumference of the semiconductor wafer and having a width that varies in order to avoid overlap near edge die areas of the semiconductor wafer.
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