Invention Grant
US07641773B2 Process for producing layers and layer systems, and coated substrate
有权
用于生产层和层系统的方法以及涂覆的基材
- Patent Title: Process for producing layers and layer systems, and coated substrate
- Patent Title (中): 用于生产层和层系统的方法以及涂覆的基材
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Application No.: US10527499Application Date: 2003-09-13
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Publication No.: US07641773B2Publication Date: 2010-01-05
- Inventor: Christoph Moelle , Lars Bewig , Frank Koppe , Thomas Kuepper , Stefan Geisler , Stefan Bauer
- Applicant: Christoph Moelle , Lars Bewig , Frank Koppe , Thomas Kuepper , Stefan Geisler , Stefan Bauer
- Applicant Address: DE Mainz
- Assignee: Schott AG
- Current Assignee: Schott AG
- Current Assignee Address: DE Mainz
- Agency: Ohlandt, Greeley, Ruggiero & Perle, L.L.P.
- Priority: DE10242848 20020914
- International Application: PCT/EP03/10222 WO 20030913
- International Announcement: WO2004/026787 WO 20040401
- Main IPC: C23C14/34
- IPC: C23C14/34
Abstract:
A method of producing substrates with functional layers which have high optical properties and/or a high surface smoothness, in particular a low turbidity and significantly lower roughness, is provided. The method includes a sputtering process for coating a substrate with at least one functional layer, the sputtering process being interrupted at least once by the application of an intermediate layer with a thickness of less than 20 nm.
Public/Granted literature
- US20060093840A1 Process for producing layers and layer systems, and coated substrate Public/Granted day:2006-05-04
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