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US07641735B2 Doped aluminum nitride crystals and methods of making them 有权
掺杂氮化铝晶体及其制备方法

Doped aluminum nitride crystals and methods of making them
Abstract:
Fabrication of doped AlN crystals and/or AlGaN epitaxial layers with high conductivity and mobility is accomplished by, for example, forming mixed crystals including a plurality of impurity species and electrically activating at least a portion of the crystal.
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