Invention Grant
US07640946B2 Vacuum treating device with lidded treatment container 失效
真空处理装置带盖处理容器

Vacuum treating device with lidded treatment container
Abstract:
A vacuum treating device, comprising a treatment container having a container body (111) and a lid (112) and allowing an internal pressure to be reduced and a lid support mechanism (130), wherein an upper opening (111a) formed in the container body can be closed airtight by the lid (112). The lid support mechanism (130) opens and closes the upper opening (111a) of the container body by moving the lid (112) so as to be translatingly moved in the vertical direction and, when the lid (112) is moved upward from the container body (111), supports the lid (112) so as to be rotated around a vertical axis disposed around the lid.
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