Invention Grant
- Patent Title: Structures for a ferroelectric field-effect transistor and related methods
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Application No.: US17861482Application Date: 2022-07-11
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Publication No.: US12159935B2Publication Date: 2024-12-03
- Inventor: Halid Mulaosmanovic , Stefan Dünkel , Sven Beyer , Joachim Metzger , Robert Binder
- Applicant: GlobalFoundries Dresden Module One Limited Liability Company & Co. KG
- Applicant Address: DE Dresden
- Assignee: GlobalFoundries Dresden Module One Limited Liability Company & Co. KG
- Current Assignee: GlobalFoundries Dresden Module One Limited Liability Company & Co. KG
- Current Assignee Address: DE Dresden
- Agency: Thompson Hine LLP
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/40 ; H01L29/51 ; H01L29/78

Abstract:
Structures for a ferroelectric field-effect transistor and methods of forming a structure for a ferroelectric field-effect transistor. The structure comprises a gate stack having a ferroelectric layer, a first conductor layer, and a second conductor layer positioned in a vertical direction between the first conductor layer and the ferroelectric layer. The first conductor layer comprises a first material, the second conductor layer comprises a second material different from the first material, and the second conductor layer is in direct contact with the ferroelectric layer.
Public/Granted literature
- US20240014320A1 STRUCTURES FOR A FERROELECTRIC FIELD-EFFECT TRANSISTOR AND RELATED METHODS Public/Granted day:2024-01-11
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