Invention Grant
- Patent Title: Shortened load port for factory interface
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Application No.: US17683938Application Date: 2022-03-01
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Publication No.: US12159802B2Publication Date: 2024-12-03
- Inventor: Srinivas Poshatrahalli Gopalakrishna , Paul B. Reuter , Devendra Channappa Holeyannavar , Douglas B. Baumgarten , Sushant S. Koshti , Arunkumar Ramachandraiah , Narayanan Ramachandran
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Main IPC: H01L21/677
- IPC: H01L21/677 ; B25J9/16

Abstract:
The disclosure describes devices, systems, and methods for integrating load locks into a factory interface footprint space. A factory interface for an electronic device manufacturing system can include a load port for receiving a substrate carrier. The load port can include a frame adapted for connecting the load port to a factory interface, the frame comprising a transport opening through which one or more substrates are capable of being transported between the substrate carrier and the factory interface. The load port can also include an actuator coupled to the frame, and a load port door coupled to the actuator and configured to seal the transport opening. The frame height can be greater than the height of the load port door, and less than 2.5 times the height of the load port door.
Public/Granted literature
- US20220285193A1 SHORTENED LOAD PORT FOR FACTORY INTERFACE Public/Granted day:2022-09-08
Information query
IPC分类: