Invention Grant
- Patent Title: Substrate treating apparatus and substrate treating method
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Application No.: US17978328Application Date: 2022-11-01
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Publication No.: US12159793B2Publication Date: 2024-12-03
- Inventor: Min Hee Cho , Kyeong Min Lee , Won Young Kang , Kang Sul Kim , Tae-Keun Kim
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Cheonan-si
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Cheonan-si
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2021-0189942 20211228
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/02

Abstract:
A substrate treating method including removing particles formed on a substrate by continuously performing a process of supplying a treatment liquid including a polymer and a solvent onto the substrate, forming a solidified liquid film by volatilizing the solvent in the treatment liquid, removing the solidified liquid film from the substrate by supplying a stripping liquid onto the substrate, and supplying a rinse liquid onto the substrate may be provided.
Public/Granted literature
- US20230207338A1 SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD Public/Granted day:2023-06-29
Information query
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