Invention Grant
- Patent Title: Photosensitive resin composition, method for forming resist pattern, method for manufacturing plated molded article, and semiconductor apparatus
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Application No.: US17269021Application Date: 2019-06-14
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Publication No.: US12158700B2Publication Date: 2024-12-03
- Inventor: Hirokazu Sakakibara , Naoki Nishiguchi , Takuhiro Taniguchi , Tomoyuki Matsumoto
- Applicant: JSR CORPORATION
- Applicant Address: JP Tokyo
- Assignee: JSR CORPORATION
- Current Assignee: JSR CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Element IP, PLC
- Priority: JP2018-157770 20180824
- International Application: PCT/JP2019/023766 WO 20190614
- International Announcement: WO2020/039717 WO 20200227
- Main IPC: G03F7/038
- IPC: G03F7/038 ; C08F220/18 ; C08F220/28 ; C25D3/12 ; C25D3/38 ; C25D5/02 ; C25D7/12 ; G03F7/004 ; G03F7/20 ; G03F7/32 ; G03F7/40

Abstract:
The present photosensitive resin composition includes a polymer (A) having a structural unit (a1) represented by a formula (a1), a structural unit (a2) represented by a formula (a2), and a structural unit (a3) represented by a formula (a3), and a photoacid generator (B). In the formulae (a1) to (a3), R12, R22, and R32 each independently represent an organic group having 1 to 10 carbon atoms; R21 represents a substituted or non-substituted alkyl group having 1 to 10 carbon atoms; R31 represents a hydrogen atom, a substituted or non-substituted alkyl group having 1 to 10 carbon atoms, or a halogen atom; R13 and R23 each independently represent an acid dissociable group; R33 represents a hydroxyaryl group; and l, m and n independently represent an integer from 0 to 10.
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