Invention Grant
- Patent Title: Semiconductor photoresist composition and method of forming patterns using the composition
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Application No.: US17217941Application Date: 2021-03-30
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Publication No.: US12158699B2Publication Date: 2024-12-03
- Inventor: Changsoo Woo , Eunmi Kang , Jaehyun Kim , Jimin Kim , Taeho Kim , Ran Namgung , Kyungsoo Moon , Hwansung Cheon , Seungyong Chae , Seung Han
- Applicant: Samsung SDI Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung SDI Co., Ltd.
- Current Assignee: Samsung SDI Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: Lewis Roca Rothgerber Christie LLP
- Priority: KR10-2020-0040507 20200402
- Main IPC: G03F7/004
- IPC: G03F7/004 ; C07F7/22 ; G03F7/20 ; H01L21/027

Abstract:
A semiconductor photoresist composition includes an organometallic compound represented by Chemical Formula 1, a photoacid generator (PAG), and a solvent: In Chemical Formula 1, R is a substituted or unsubstituted C1 to C20 alkyl group, a substituted or unsubstituted C3 to C20 cycloalkyl group, a substituted or unsubstituted C2 to C20 aliphatic unsaturated organic group including at least one double bond or triple bond, a substituted or unsubstituted C6 to C30 aryl group, an ethoxy group, a propoxy group, or a combination thereof; and X, Y, and Z are each independently —OR1 or —OC(═O)R2.
Public/Granted literature
- US20210311387A1 SEMICONDUCTOR PHOTORESIST COMPOSITION AND METHOD OF FORMING PATTERNS USING THE COMPOSITION Public/Granted day:2021-10-07
Information query
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