Lithium ion batteries, methods of making the same, and equipment for making the same are provided. In one or more embodiments, an integrated processing system operable to form a pre-lithiated electrode includes a reel-to-reel system operable to transport a continuous sheet of material through processing chambers and a pre-lithiation module defining a processing region and is adapted to process the continuous sheet of material. The pre-lithiation module contains a lithium metal target operable to contact and supplying lithium to the continuous sheet of material, a press coupled with the lithium metal target and operable to move the lithium metal target into contact with the continuous sheet of material, one or more ultrasonic transducers positioned in the processing region and operable to apply ultrasonic energy to the lithium metal target, and one or more heat sources positioned in the processing region and operable to heat the lithium metal target.