Invention Grant
- Patent Title: Three-dimensional memory devices with drain-select-gate cut structures and methods for forming the same
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Application No.: US17344949Application Date: 2021-06-11
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Publication No.: US12082414B2Publication Date: 2024-09-03
- Inventor: Jianzhong Wu , Zongke Xu , Jingjing Geng
- Applicant: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Applicant Address: CN Wuhan
- Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee Address: CN Wuhan
- Agency: BAYES PLLC
- The original application number of the division: US16881173 2020.05.22
- Main IPC: H10B43/27
- IPC: H10B43/27 ; H10B43/10 ; H10B43/35

Abstract:
Embodiments of structures and methods for forming three-dimensional (3D) memory devices are provided. In an example, a 3D memory device includes a core region and a staircase region. The staircase region includes a plurality of stairs each has at least a conductor/dielectric pair extending in a lateral direction. The staircase region includes a drain-select-gate (DSG) cut structure extending along the lateral direction and a vertical direction, and a plurality of support structures extending in the DSG structure along the vertical direction. Of at least one of the support structures, a dimension along the lateral direction is greater than a dimension along a second lateral direction perpendicular to the lateral direction.
Public/Granted literature
- US20210335812A1 THREE-DIMENSIONAL MEMORY DEVICES WITH DRAIN-SELECT-GATE CUT STRUCTURES AND METHODS FOR FORMING THE SAME Public/Granted day:2021-10-28
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