Invention Grant
- Patent Title: Channel structures having protruding portions in three-dimensional memory device and method for forming the same
-
Application No.: US17084423Application Date: 2020-10-29
-
Publication No.: US12035524B2Publication Date: 2024-07-09
- Inventor: Wanbo Geng , Lei Xue , Xiaoxin Liu , Tingting Gao
- Applicant: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Applicant Address: CN Wuhan
- Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee Address: CN Wuhan
- Agency: BAYES PLLC
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H10B43/27 ; H01L21/311

Abstract:
Embodiments of three-dimensional (3D) memory devices and methods for forming the same are disclosed. In an example, a 3D memory device includes a substrate, a memory stack disposed on the substrate and including a plurality of interleaved conductive layers and dielectric layers, and a plurality of channel structures each extending vertically through the memory stack and having a plurality of protruding portions abutting the conductive layers and a plurality of normal portions abutting the dielectric layers. Each of the plurality of channel structures includes a blocking layer along a sidewall of the channel structure, and a storage layer over the blocking layer. The storage layer includes a plurality of charge trapping structures in the protruding portions of the channel structure, and a plurality of protecting structures in the normal portions of the channel structure and connecting the plurality of charge trapping structures.
Public/Granted literature
Information query
IPC分类: