A transfer apparatus includes a first linear transfer part which moves a slider in a first direction by using a first fixed linear module fixed on a first base; a module moving part which moves a module holding member holding a movable linear module in a second direction different from the first direction, to position the movable linear module at a first coupling position to couple with the first fixed linear module and cause the slider to transfer between the movable and first fixed linear modules; a linear scale having a scale extending in the second direction and a sensor which detects the scale; and a controller which acquires first module position information indicating a position of the movable linear module relative to the first fixed linear module in the second direction and controls movement of the module holding member based on the first module position information.