Invention Grant
- Patent Title: Mid-manufacturing semiconductor wafer layer testing
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Application No.: US17463556Application Date: 2021-09-01
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Publication No.: US12033902B2Publication Date: 2024-07-09
- Inventor: Feng-Chien Hsieh , Ting-Hao Chang , Chun-Hao Lin , Yun-Wei Cheng , Kuo-Cheng Lee
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Kilpatrick Townsend & Stockton LLP
- Main IPC: H01L21/66
- IPC: H01L21/66 ; H01L21/265 ; H01L27/144

Abstract:
A method of manufacturing a semiconductor wafer is disclosed. The method includes exposing the semiconductor wafer to one or more dopant species to form one or more first implant layers on the semiconductor wafer, testing one or more geometric parameter values of the formed one or more first implant layers, after testing the one or more geometric parameter values, conditionally exposing the semiconductor wafer to one or more dopant species to form one or more additional implant layers on the semiconductor wafer, after forming the one or more additional implant layers, conditionally forming one or more additional circuit layers on the semiconductor wafer to form a plurality of functional electronic circuits on the semiconductor wafer, and conditionally testing the semiconductor wafer with a wafer acceptance test (WAT) operation.
Public/Granted literature
- US20220301950A1 MID-MANUFACTURING SEMICONDUCTOR WAFER LAYER TESTING Public/Granted day:2022-09-22
Information query
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