Invention Grant
- Patent Title: Ultrasonic transducer unit and manufacturing method thereof
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Application No.: US17427358Application Date: 2020-10-30
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Publication No.: US12030084B2Publication Date: 2024-07-09
- Inventor: Hui Hua , Yanzhao Li
- Applicant: BOE TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: HOUTTEMAN LAW LLC
- International Application: PCT/CN2020/125147 2020.10.30
- International Announcement: WO2022/088015A 2022.05.05
- Date entered country: 2021-07-30
- Main IPC: B06B1/02
- IPC: B06B1/02

Abstract:
The present disclosure provides an ultrasonic transducer unit and a manufacturing method thereof. The ultrasonic transducer unit includes a substrate, a first electrode arranged on the substrate, an insulating layer arranged on the first electrode, a vibrating film arranged on the insulating layer, a closed cavity being between the vibrating film and the insulating layer, and a second electrode arranged on the vibrating film. The vibrating film is made of a photoresist. The ultrasonic transducer unit disclosed by the present disclosure adopts the photoresist as a material of the insulating layer and/or the vibrating film, so that the ultrasonic transducer unit with better performance can be obtained.
Public/Granted literature
- US20220347721A1 ULTRASONIC TRANSDUCER UNIT AND MANUFACTURING METHOD THEREOF Public/Granted day:2022-11-03
Information query
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