Invention Grant
- Patent Title: Semiconductor memory devices
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Application No.: US17716215Application Date: 2022-04-08
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Publication No.: US12029029B2Publication Date: 2024-07-02
- Inventor: Kyunghwan Lee , Yongseok Kim , Hyuncheol Kim , Dongsoo Woo , Sungwon Yoo
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: HARNESS, DICKEY & PIERCE, P.L.C.
- Priority: KR 20210060737 2021.05.11
- Main IPC: H10B12/00
- IPC: H10B12/00 ; H01L29/423 ; H01L29/792

Abstract:
A semiconductor memory device includes a semiconductor substrate a gate structure extending in a vertical direction on the semiconductor device, a plurality of charge trap layers spaced apart from each other in the vertical direction and each having a horizontal cross-section with a first ring shape surrounding the gate structure, a plurality of semiconductor patterns spaced apart from each other in the vertical direction and each having a horizontal cross-section with a second ring shape surrounding the plurality of charge trap layers, a source region and a source line at one end of each of the plurality of semiconductor patterns in a horizontal direction, and a drain region and a drain line at an other end of each of the plurality of semiconductor patterns in the horizontal direction. The gate structure may include a gate insulation layer and a gate electrode layer.
Public/Granted literature
- US20220367479A1 SEMICONDUCTOR MEMORY DEVICES Public/Granted day:2022-11-17
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