Invention Grant
- Patent Title: Plasma processing apparatus and high-frequency power application method of plasma processing apparatus
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Application No.: US17470657Application Date: 2021-09-09
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Publication No.: US12027347B2Publication Date: 2024-07-02
- Inventor: Naoki Matsumoto , Masaru Sasaki
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: XSENSUS LLP
- Priority: JP 20151637 2020.09.09
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
A plasma processing apparatus includes a vacuum-exhaustible processing container, an electrode installed in the processing container, a plurality of power feeding portions connected to a peripheral portion of a back surface of the electrode, a high-frequency power supply configured to supply high-frequency power to the electrode through the plurality of power feeding portions, and a control unit. The control unit is configured to control the plasma processing apparatus to periodically apply the high-frequency power to each of the plurality of power feeding portions.
Public/Granted literature
- US20220076928A1 PLASMA PROCESSING APPARATUS AND HIGH-FREQUENCY POWER APPLICATION METHOD OF PLASMA PROCESSING APPARATUS Public/Granted day:2022-03-10
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